Synopsys Tcad Taurus Tsuprem4 2010.03 Linux
Taurus TSUPREM-4 is an advanced 1D and 2D process simulator for developing semiconductor process technologies and optimizing their performance. With a comprehensive set of advanced process models, Taurus TSUPREM-4 simulates the process steps used for fabricating semiconductor devices, reducing the need for costly experiments using silicon. In addition, Taurus TSUPREM-4 has extensive stress modeling capabilities, allowing optimization of stress to increase device performance.Benefits Develop cost effective, leading-edge CMOS, bipolar, and power device manufacturing processes Predict 1D and 2D device structure characteristics by accurately simulating ion implantation, diffusion, oxidation, silicidation, epitaxy, etching and deposition processing, reducing experimental runs and technology development time Analyze stress history in all layers as a result of thermal oxidation, silicidation, thermal mismatch, etching, deposition and stress...