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Silvaco TCAD 2014

3D Process Simulator Victory Process is a general purpose layout driven 1D, 2D and 3D process simulator including Etching and deposition, Implantation, Diffusion and Oxidation simulation capabilities. Proprietary models, as well as public domain research models can be integrated into Victory Process using the open modeling interface.Key Features Fast 3D structure prototyping capability enables the in-depth physical analysis of specific processing issues Comprehensive set of diffusion models: Fermi, fullcpl, single-pair, and five-stream Physical oxidation simulation with stress analysis Extremely accurate and fast Monte Carlo implant simulation Efficient multi-threading of time critical operations of Monte Carlo implantation, diffusion, oxidation, and physical etching and deposition Sophisticated multi-particle flux models for physical deposition and etching with substrate material redeposition Open architecture allows easy...

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