Synopsys Sold 2007.06
Synopsys Online Documentation——Synopsys的在线文档。 ::::::English Description:::::: SOLID E3-Dimensional Optical Lithography SimulationSOLID E is a window-based software package for simulating and modeling all the processes and techniques involved in optical microlithography. It is able to simulate the evolution of three-dimensional topographical features in integrated circuit devices throughout the various phases of the microlithography process. Due to its sound physical approach it has a high predictive power, enabling lithography engineers to draw on simulation results to optimize the process technology. This helps to increase the yield and to fully exploit the capabilities of existing equipment. SOLID E is the only lithography simulator on the market capable of simulating wafer topography in three dimensions. SOLID E with M-module – models photomasks and accurately predicts...