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Silvaco TCAD 2012.3 for win

VICTORY Process3D PROCESS SIMULATOR VICTORY Process is a general purpose 3D process simulator. VICTORY Process includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit. Proprietary models, as well as public domain research models, can be easily integrated into VICTORY Process using the open modeling interface.Key Features Sophisticated multi-particle flux models for physical deposition and etching with substrate material redeposition Extremely accurate and fast Monte Carlo implant simulation Comprehensive set of 3D diffusion models: Fermi, three-stream, and five-stream 3D physical oxidation simulation with stress analysis Fast 3D structure prototyping capability enables the in-depth physical analysis of specific processing issues Accurately predicts 3D topology and 3D dopant...

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