Silvaco TCAD 2012
VICTORY Process is a general purpose 3D process simulator. VICTORY Process includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit. Proprietary models, as well as public domain research models, can be easily integrated into VICTORY Process using the open modeling interface.The Interactive Tools are a suite of applications that provide interactive GUI-based pre and post processing services to Silvaco’s 1D, 2D and 3D TCAD simulators. The tools within the interactive tools suite are fully integrated and provide users with a comfortable environment within which all TCAD simulations can be performed. Key Features Sophisticated multi-particle flux models for physical deposition and etching with substrate material redeposition...