Silvaco TCAD 2018
Silvaco TCAD 2018 Layout-Driven 3D Process Simulator Victory Process is a general purpose 1D, 2D and layout-driven 3D process simulator for applications including: Etching and Deposition with geometrical models for fast structure prototyping with physical models for detailed process step analysis Implantation with very fast analytical models with very accurate Monte-Carlo models Annealing with comprehensive set of doping diffusion models with a hierarchy of oxidation models Stress simulation with stress history for stress engineering Introduction One of the most important uses of TCAD tools is to explore new device technology where many exploratory simulations are performed in order to give the device designer a better understanding of the possible benefits and drawbacks of a given technology. This use case demands...