Taurus TSUPREM-4 is an advanced 1D and 2D process simulator for developing semiconductor process technologies and optimizing their performance. With a comprehensive set of advanced process models, Taurus TSUPREM-4 simulates the process steps used for fabricating semiconductor devices, reducing the need for costly experiments using silicon. In addition, Taurus TSUPREM-4 has extensive stress modeling capabilities, allowing optimization of stress to increase device performance.Benefits Develop cost effective, leading-edge CMOS, bipolar, and power device manufacturing processes Predict 1D and 2D device structure characteristics by accurately simulating ion implantation, diffusion, oxidation, silicidation, epitaxy, etching and deposition processing, reducing experimental runs and technology development time Analyze stress history in all layers as a result of thermal oxidation, silicidation, thermal mismatch, etching, deposition and stress...
Taurus TSUPREM-4 is an advanced 1D and 2D process simulator for developing semiconductor process technologies and optimizing their performance. With a comprehensive set of advanced process models, Taurus TSUPREM-4 simulates the process steps used for fabricating semiconductor devices, reducing the need for costly experiments using silicon. In addition, Taurus TSUPREM-4 has extensive stress modeling capabilities, allowing optimization of stress to increase device performance.Benefits Develop cost effective, leading-edge CMOS, bipolar, and power device manufacturing processes Predict 1D and 2D device structure characteristics by accurately simulating ion implantation, diffusion, oxidation, silicidation, epitaxy, etching and deposition processing, reducing experimental runs and technology development time Analyze stress history in all layers as a result of thermal oxidation, silicidation, thermal mismatch, etching, deposition and stress...
Installing the SoftwareThe TCAD tools use the Synopsys Installer tool, which allows you to use agraphical user interface (GUI) or a text script. For information aboutdownloading Synopsys Installer and the TCAD tools, see Installing SynopsysTools, available at http://www.synopsys.com/install.To install the TCAD tools by EST or from the CD, follow the proceduresdescribed in Installing Synopsys Tools.Installing Synopsys Tools shows an example Synopsys media installation scriptfor the synthesis tools. The TCAD software is installed in a similar manner.The TCAD tools are stand-alone products and cannot be installed over otherexisting Synopsys products. You must create a new directory for each TCADproduct (such as Sentaurus, Taurus, Raphael NXT).Sentaurus can be installed in the same Sentaurus directory (STROOT) used forearlier Sentaurus releases (this is recommended)....
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